Model No.︰ZrSi2
Brand Name︰TYR
Country of Origin︰China
Unit Price︰US $ 350 / kg
Minimum Order︰1 kg
Zirconium disilicide, ZrSi2 ceramic sputtering target
purity: 99.5%
Shape: Discs, disks, step disk, delta, plate, sheets or made per drawing
Diameter: 355.6mm (14") max.
Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, if larger size than this, we can do it as Tiles joint by 45 degree or 90 degree
Made sputtering targets method: hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering
Zirconium(IV) silicide is an inorganic chemical compound with the chemical formula ZrSi2, consisting of zirconium and silicon atoms. Appearance: Grey odorless powder,
Molar mass: 147.39, density: 4.88g/cm3, Melting point: 1620oC (1790oC), Element: Si: 38.11, Zr: 61.89.
Applications: the raw material made in metal ceramic (cermet), the crucible for made semiconductor thin film coating material
We also supply below Silicide sputtering targets material:
Chromium Silicide , CrSi2 target
Cobalt Silicide , Co3Si target
Hafnium Silicide , HfSi2 target
Molybdenum silicide, MoSi2, Mo5Si3 target
Nickel Silicide , NiSi target
Niobium Silicide , Nb5Si3, NbSi2 target
Tantalum Silicide , Ta5Si3, TaSi2 target
Titanium silicide, Ti5Si3, TiSi2 target
Tungsten Silicide , WSi2 target
Vanadium silicide , V3Si, VSi2 target
Zirconium disilicide, ZrSi2 targets
specification︰ Zirconium disilicide,ZrSi2 powder, sputtering targets
Label︰ Zirconium disilicide ZrSi2 sputtering targets CAS 12039-90-6